Hydrogen Passivation of Grain Boundaries in Polysilicon: Computer Simulation Conference Paper uri icon

abstract

  • All rights reserved. No part of contents of this paper may be reproduced or transmitted in any form or by any means without the written permission of Trans Tech Publications, www.ttp.net. (#70357801, Google Scholar-09/10/16,20:32:08) … 260 Gettering and Defect Engineering in Semiconductor Technology … 262 Gettering and Defect Engineering in Semiconductor Technology … 264 Gettering and Defect Engineering in Semiconductor Technology

publication date

  • January 1, 1991