Experimental investigation on mode coupling of bulk mode silicon MEMS resonators Conference Paper uri icon


  • Abstract: This paper demonstrates the effect of nonlinear elasticity on the coupling between different bulk modes of silicon MEMS resonators. From experimental data, we observe that the coupling has a strong dependence on the resonant mode order, the mode shape of the coupled modes, as well as the doping type/concentration, and crystal orientation, leading to a variety of complex and potentially useful phenomena.

publication date

  • January 1, 2015