A queuing network model for wafer fabrication using decomposition without aggregation Conference Paper uri icon

abstract

  • Deterministic capacity models and simulation models cannot fully comprehend the modern wafer fabrication facility's need for cycle time (CT) forecasts that are both accurate and rapid. Queuing networks, being stochastic yet analytical models, have the potential of providing sufficiently accurate 'on the spot' CT approximations. In this paper, we characterize a queuing network suited for fab modeling and then formulate a queuing network model for a mini-fab, using decomposition without aggregation method to yield CT approximations. Numerical results demonstrate that this proposed approach generates fairly accurate approximations with an average error of 7% compared to simulation results, better than other existing methods to date.

publication date

  • January 1, 2013