Local Heat Transfer Coefficients Measurement Under Micro Jet Impinging Using Nitrogen Gas (N2) Conference Paper uri icon


  • ABSTRACT Experimental and simulation studies were performed to reveal local heat transfer coefficients under jet impinging in micro domain with Nitrogen gas. The experimental device was made of a 500 µm thick Pyrex and 400 µm thick silicon wafers. On the Pyrex wafer, four 100 nm thick resistance temperature detector (RTD) thermistors and a heater were fabricated from titanium. Jet orifices were etched by deep reactive ion etching (DRIE) on a silicon wafer, which was attached to the Pyrex wafer through a vinyl sticker …

publication date

  • July 10, 2016