1 Gb/s Si high quantum efficiency monolithically integrable λ= 0.88 μm detector Academic Article uri icon

abstract

  • We propose and demonstrate a 1 Gb/s high quantum efficiency Si MSM metal-semiconductor-metal detector which is complementary metal-oxide semiconductor compatible. The detector absorbs over 50% of the light entering the active layer at a wavelength of λ=0.88 μm.

publication date

  • January 1, 1995